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The Science and Engineering of Microelectronic Fabrication

The Science and Engineering of Microelectronic Fabrication

The Science and Engineering of Microelectronic Fabrication
By Stephen A. Campbell

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Book Description

Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the popular process simulation package SUPREM to provide more meaningful examples of the type of real-world dopant redistribution problems that microelectronic fabrication engineers must face.
This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST).

Book Details

  • Amazon Sales Rank: #1147718 in Books
  • Published on: 2001-02-15
  • Ingredients: Example Ingredients
  • Original language: English
  • Number of items: 1
  • Dimensions: 8.80" h x 1.40" w x 7.60" l, 2.65 pounds
  • Binding: Hardcover
  • 624 pages

Editorial Reviews

About the Author
Stephen A. Campbell is at University of Minnesota.

Customer Reviews

Most helpful customer reviews

0 of 0 people found the following review helpful.
5Five Stars
By Luncun Wei

0 of 0 people found the following review helpful.
5Great for anyone studying micro-fab or material science
By Amazon Customer
I used this book throughout the final year of my BS in EE up until completing my PhD. This book is an excellent reference and gives a general overview of most of the processes used in a micro-fabrication research environment. I always recommend this book alongside Materials Science of Thin Films by Ohring for anyone in the micro-fab or materials science fields. The book may not go into great depth, but that is not expected from a general overview type of book; the same can be said for Ohring.

0 of 0 people found the following review helpful.
5Five Stars
By Amazon Customer
As if never used, well priced...

See all 10 customer reviews...
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