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Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)
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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
- Amazon Sales Rank: #68231 in Books
- Published on: 2012-11-15
- Released on: 2012-11-15
- Original language: English
- Number of items: 1
- Dimensions: 7.50" h x 1.20" w x 9.20" l, 2.37 pounds
- Binding: Paperback
- 688 pages
"This is one of the best texts in the field. It provides the most complete coverage of fabrication techniques."--Xian-An Cao, West Virginia University
"I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material."--Trevor Thornton, Arizona State University
About the Author
Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.
Most helpful customer reviews
2 of 2 people found the following review helpful.
Book is good but has issues
By Daniel Dupuis
Some of the variables in the equations are not clearly defined, and the author uses t for both time AND thickness which makes it confusing unless you go through the book in numerical order. The questions are not always worded clearly. The text has useful and relevant processing topics and goes into good detail about them.
1 of 2 people found the following review helpful.
stay with the classic books, don't switch to this
This book is not well-written, fails to explain a large number of their variables/derivations, contains a substantial # of errors, and the solutions are absolutely incorrect for several examples and problems.
They even have placed an incorrect intrinsic carrier concentration plot in this textbook as well...
definitely do not recommend... go with the classic books instead
7 of 12 people found the following review helpful.
Worst text book ever!
I am right now using it as textbook, and this book is just unreadable! I am a graduate student now study electrophysics with a Bachelor background of automation. Honestly, I do lack background of things like solid-state chemistry and electronic materia as background for subject this book is about. However, it is not only the problem that this textbook has, which is NEVER EXPLAINS ANY ESSENTIAL TERMS FOR ANY TOPIC, which makes reading it require a huge amount of additional reading to understand a single term which the author could explain with a single word! Guess what? You will become a freaking chemist after you trying to understand each new term of this book, but you just don't have that much time in a single semester! The second problem is about equations the author introduced. Yes! The author gave a huge number of equations, WITH A LOT OF UNEXPLAINED ARGUMENT! This is a problem no one can understand even if he has a boundfull background! How should I know what the hell does an unexplained x stand for in a new equation? This leads to the third problem, the author give a lot of ambiguous description either for readings or problems! Sentence like 'diffusion length is much larger than the widhth of the initial profile' can be find everywhere in reading parts and problems, making you guess like a moron: 'may be the width here means depth? Or is it?' No, you can absolutely find nothing explained what is length here in context! The last but not least problem I want to complain is the problems left behind each chapter: besides the ambiguous words you have to guess, you will find that many of the problems actually have nothing to do with the content of this chapter, you will find no examples in this chapter, no suggestions for references, no explanations of terms, you will just stare at them and think: what the hell are you talking about! One strange thing about examples in this book is that you will never know how did the author come from the conditions directly to the answers, he just say things like: 'I luckily found a nickle on my way home one week ago, so I came to school early today.' which he should describe like:' I luckily found a nickle two weeks ago, and I kept it in my pocket. This morning I reached to my pocket and find the nickle, and I feel like to take a bus to school instead of walking there as usual. And the bus is really faster than walking. So I came to shool early today.' You got it?
I guess the author just wrote down what ever came to his mind and cared nothing about whether others can understand what he said! Come on! If anyone need no introduce to anything you said, why do they need your book as textbook? It is not a paper! It is a textbook! Who cares how many references you refered to? Just give us a clear definition!